- All sections
- C - Chemistry; metallurgy
- C23C - Coating metallic material; coating material with metallic material; surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 16/06 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes characterised by the deposition of metallic material
Patent holdings for IPC class C23C 16/06
Total number of patents in this class: 1089
10-year publication summary
|
97
|
106
|
91
|
88
|
81
|
89
|
82
|
104
|
70
|
31
|
| 2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Applied Materials, Inc. | 16587 |
141 |
| Tokyo Electron Limited | 11599 |
83 |
| Lam Research Corporation | 4775 |
58 |
| ASM IP Holding B.V. | 1715 |
49 |
| Kokusai Electric Corporation | 1791 |
24 |
| Entegris, Inc. | 1736 |
21 |
| L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude | 3515 |
20 |
| Rtx Corporation | 8674 |
17 |
| Novellus Systems, Inc. | 559 |
13 |
| Samsung Electronics Co., Ltd. | 131630 |
12 |
| Quantum Elements Development, Inc. | 18 |
11 |
| ASM International N.V. | 150 |
10 |
| Up Chemical Co., Ltd. | 55 |
10 |
| Commissariat à l'énergie atomique et aux energies alternatives | 10525 |
9 |
| Adeka Corporation | 1333 |
9 |
| ULVAC, Inc. | 1448 |
9 |
| International Business Machines Corporation | 60644 |
8 |
| Micron Technology, Inc. | 24960 |
8 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 36809 |
8 |
| Safran Aircraft Engines | 5739 |
8 |
| Other owners | 561 |